{"title":"Devices for particle handling by an AC electric field","authors":"F. M. Moesner, T. Higuchi","doi":"10.1109/MEMSYS.1995.472552","DOIUrl":null,"url":null,"abstract":"Devices for particle handling using an AC electric field are proposed and experimentally validated. With the application of balanced multi- phase high voltage in the 200Vptp to 2kVptp range to a series of encased parallel electrodes with a cen- ter-to-center pitch length of 400pm, particles on a thin protecting and insulating film become charged and are conveyed by the created traveling field. Devices with various novel transportation and ma- nipulation features, utilizing multi-phase AC electric fields that instantly generate particle driving forces, have been designed and produced. Their features include newly developed methods for particle con- veyance smoothing, grouping, and sorting, as well as two-dimensional handling. Particle conveyance char- aderistics have been studied under the influence of three different voltage profiles and in diverse envi- ronments. Various particle materials with a 5pm to 400pm diameter range have been examined in ex- periments; Fe, AZ, glass, and plastic spheres showed the best performances.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":" 743","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"45","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1995.472552","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 45
Abstract
Devices for particle handling using an AC electric field are proposed and experimentally validated. With the application of balanced multi- phase high voltage in the 200Vptp to 2kVptp range to a series of encased parallel electrodes with a cen- ter-to-center pitch length of 400pm, particles on a thin protecting and insulating film become charged and are conveyed by the created traveling field. Devices with various novel transportation and ma- nipulation features, utilizing multi-phase AC electric fields that instantly generate particle driving forces, have been designed and produced. Their features include newly developed methods for particle con- veyance smoothing, grouping, and sorting, as well as two-dimensional handling. Particle conveyance char- aderistics have been studied under the influence of three different voltage profiles and in diverse envi- ronments. Various particle materials with a 5pm to 400pm diameter range have been examined in ex- periments; Fe, AZ, glass, and plastic spheres showed the best performances.