Fabrication of amorphous carbon films by using organic hydrocarbon source

Abstract

Hydrogenated amorphous carbon films were prepared by using organic hydrocarbon source, xylene, in a plasma enhanced chemical vapor deposition (PECVD) system. The microstructures and optical properties were investigated by using various kinds of techniques. It was found that there exist sp/sup 2/-structures with aromatic clusters in the films. Moreover, in contrast to a broad single PL peak in methane-based a-C:H films, the PL spectrum of xylene-based a-C:H films contains multiple peaks in blue-green light region, which is influenced by rf power. Field emission was also observed among xylene-based a-C:H films with a high sp/sup 2/ content ratio.