J. Masson, A. Bich, W. Noell, R. Voelkel, K. Weible, N. D. de Rooij
{"title":"Tunable optical diffusers for high-power laser applications based on magnetically actuated membranes","authors":"J. Masson, A. Bich, W. Noell, R. Voelkel, K. Weible, N. D. de Rooij","doi":"10.1109/OMEMS.2010.5672185","DOIUrl":null,"url":null,"abstract":"A dynamic laser beam shaper based on MEMS technology is presented. A magnetically actuated deformable single crystal silicon micromembrane is deformed in resonance to diffuse and homogenize laser beams. The large aperture mirror shows line generation with angles up to 1° and line smoothing capabilities. High power density handling is demonstrated up to 140 W/cm2.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"35 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2010.5672185","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
A dynamic laser beam shaper based on MEMS technology is presented. A magnetically actuated deformable single crystal silicon micromembrane is deformed in resonance to diffuse and homogenize laser beams. The large aperture mirror shows line generation with angles up to 1° and line smoothing capabilities. High power density handling is demonstrated up to 140 W/cm2.
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