A novel amorphous silicon thin film transistor for AMLCDs

Y. Byun, W. den Beer, Moshi Yang, T. Gu
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Abstract

In AMLCD (Active Matrix Liquid Crystal display) applications minimizing Cgs, the parasitic capacitance between gate and source of a-Si TFT, reduces flicker, image retention and gray scale nonuniformity and makes it possible to further increase display size and resolution. Cgs is generally minimized by shrinking the device size, e.g. by using ion doping for the n/sup +/ contact formation in a self-aligned trilayer type TFT. We present a TFT with a novel geometry to reduce Cgs and photosensitivity.
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一种新型非晶硅薄膜晶体管
在最小化Cgs的AMLCD(有源矩阵液晶显示)应用中,a-Si TFT栅极和源之间的寄生电容减少了闪烁、图像保留和灰度不均匀性,并使进一步增加显示尺寸和分辨率成为可能。通常通过缩小器件尺寸来最小化Cgs,例如在自对齐三层TFT中使用离子掺杂来形成n/sup +/触点。我们提出了一种具有新颖几何形状的TFT,以减少Cgs和光敏性。
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