A. Varpula, A. Shchepetov, K. Grigoras, J. Hassel, M. Prunnila, J. Ahopelto
{"title":"Silicon Membranes for Nanophononics","authors":"A. Varpula, A. Shchepetov, K. Grigoras, J. Hassel, M. Prunnila, J. Ahopelto","doi":"10.1109/NANO.2018.8626348","DOIUrl":null,"url":null,"abstract":"The highly reduced thermal conductivity arising from confinement of acoustic phonons and enhanced phonon scattering in ultra-thin freestanding silicon membranes enables fabrication of sensitive thermal thermoelectric detectors. The devices show very low noise equivalent power of 13 pW/ Hz 1/2 and relatively fast operation. By optimizing the structure and electrical properties of the detector, the operation can approach the temperature fluctuation limit.","PeriodicalId":425521,"journal":{"name":"2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO.2018.8626348","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The highly reduced thermal conductivity arising from confinement of acoustic phonons and enhanced phonon scattering in ultra-thin freestanding silicon membranes enables fabrication of sensitive thermal thermoelectric detectors. The devices show very low noise equivalent power of 13 pW/ Hz 1/2 and relatively fast operation. By optimizing the structure and electrical properties of the detector, the operation can approach the temperature fluctuation limit.
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