{"title":"An Evaluation Of an End Excited Electron Cyclotron Resonance Plasma Source","authors":"P. Mak, J. Asmussen","doi":"10.1109/PLASMA.1994.588708","DOIUrl":null,"url":null,"abstract":"In this paper, the experimental performance of several different multipolar ECR plasma source configuration will be compared using an argon gas input and measuring: 1) impressed electric field, 2) plasma source output species densities, 3) electron and ion energy distribution functions, input and pressure. Meanwhile, the evaluation of each reactor configuration will also investigate the output performance as the excitation is varied through several different electromagnetic modes. The evaluation is done by comparing output density uniformity, ion production power cost in eV/ion, microwave coupling efficiency and absorbed microwave power density in Watts/cm.","PeriodicalId":254741,"journal":{"name":"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)","volume":"66 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLASMA.1994.588708","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, the experimental performance of several different multipolar ECR plasma source configuration will be compared using an argon gas input and measuring: 1) impressed electric field, 2) plasma source output species densities, 3) electron and ion energy distribution functions, input and pressure. Meanwhile, the evaluation of each reactor configuration will also investigate the output performance as the excitation is varied through several different electromagnetic modes. The evaluation is done by comparing output density uniformity, ion production power cost in eV/ion, microwave coupling efficiency and absorbed microwave power density in Watts/cm.
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