{"title":"SIMOX 3-D sculpting of vertically-coupled microresonators in silicon","authors":"P. Koonath, T. Indukuri, B. Jalali","doi":"10.1109/LEOSST.2004.1338729","DOIUrl":null,"url":null,"abstract":"In this paper we report the demonstration of vertically coupled microdisk resonator structures on SOI substrates, using the technique of SIMOX 3-D sculpting.","PeriodicalId":280347,"journal":{"name":"Digest of the LEOS Summer Topical Meetings Biophotonics/Optical Interconnects and VLSI Photonics/WBM Microcavities, 2004.","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of the LEOS Summer Topical Meetings Biophotonics/Optical Interconnects and VLSI Photonics/WBM Microcavities, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LEOSST.2004.1338729","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper we report the demonstration of vertically coupled microdisk resonator structures on SOI substrates, using the technique of SIMOX 3-D sculpting.
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