The study of adsorption gas sensor based carbon nanotube film

Abstract

The study of gas sensitivity of multi-wall carbon nanotubes (MWNTs), which is deposited by low press chemical vapor deposition (LPCVD), is presented. The results show that the pure MWNTs are not sensitive to the gases measured, while the composite film consisting of the MWNTs and silicon dioxide is sensitive to the methane, the hydrogen and the acetylene. The MWNTs and silicon dioxide composite film have the capacitance characteristic because of the formation of Schottky junctions within the MWNTs. The chemistry adsorption of the gas measured on the surface of the MWNTs affects the space discharge area of the Schottky junction, so that the dielectric constant changes with the gas concentration. That is why the gas is sensed.