{"title":"Novel acoustic-wave micromixer","authors":"V. Vivek, E. S. Kim","doi":"10.1109/MEMSYS.2000.838598","DOIUrl":null,"url":null,"abstract":"This paper describes a novel Fresnel Annular Sector Actuator (FASA) and FASA-based micromixers built on PZT substrate. This actuator generates strong lateral acoustic thrusts in liquid, and is very effective in micromixing fluids. Almost any lateral fluidic motion can be produced with appropriate electrode patterns on FASA and with a combination of various FASA elements. We have developed the following three micromixers based on FASA elements: overlap design, four-sector design and six-sector design. Experimental results obtained on the fabricated FASA and micromixers confirm the theory and simulation.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"48","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2000.838598","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 48
Abstract
This paper describes a novel Fresnel Annular Sector Actuator (FASA) and FASA-based micromixers built on PZT substrate. This actuator generates strong lateral acoustic thrusts in liquid, and is very effective in micromixing fluids. Almost any lateral fluidic motion can be produced with appropriate electrode patterns on FASA and with a combination of various FASA elements. We have developed the following three micromixers based on FASA elements: overlap design, four-sector design and six-sector design. Experimental results obtained on the fabricated FASA and micromixers confirm the theory and simulation.
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