Electret Based Wireless Micro Ionizing Radiation Dosimeter

19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI:10.1109/MEMSYS.2006.1627873

C. Son, B. Ziaie

引用次数: 8

Abstract

Wireless ionizing radiation sensors have a wide range of applications in areas such as radiation therapy, environmental monitoring, and homeland security. It is preferable to manufacture such sensors using passive elements since ionizing radiation can damage active electronic components. This paper reports the development of a first micromachined totally passive electret based wireless ionizing radiation dosimeter for high dose radiation therapy applications. Wireless Ionizing radiation measurement is performed by monitoring the resonance frequency change with a phase-dip technique. Device test results show that 60,000R gamma-ray ionizing radiation exposure produces a 687kHz resonance frequency shift resulting in a sensitivity of 11.45kHz/kR.

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驻极体无线微电离辐射剂量计

无线电离辐射传感器在放射治疗、环境监测、国土安全等领域有着广泛的应用。由于电离辐射会损坏有源电子元件，因此优选使用无源元件制造此类传感器。本文报道了第一台用于高剂量放射治疗的微机械全被动驻极体无线电离辐射剂量计的研制。无线电离辐射测量是通过相位倾斜技术监测谐振频率变化来实现的。器件测试结果表明，60000 r伽马射线电离辐射暴露产生687kHz共振频移，灵敏度为11.45kHz/kR。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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19th IEEE International Conference on Micro Electro Mechanical Systems

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