Long Wu, Jie Ma, Hongyi Li, Jianzhong Wei, Wen Cheng
{"title":"Study on Preparation Process and Properties of CVD Tungsten Composite Coating on TC4 Titanium Alloy Surface","authors":"Long Wu, Jie Ma, Hongyi Li, Jianzhong Wei, Wen Cheng","doi":"10.1109/ICEDME50972.2020.00113","DOIUrl":null,"url":null,"abstract":"This paper introduces the preparation method and performance study of chemical vapor deposition (CVD) tungsten composite coating on TC4 titanium alloy surface. The magnetron sputtering method is used to introduce an intermediate transition layer to avoid corrosion of the titanium substrate by the formation of oxides on the surface of the titanium alloy and HF formed by CVD. After the performance test, the binding force of the composite coating and the titanium substrate was improved, and the wear resistance and corrosion resistance of the titanium alloy surface were further improved.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"102 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEDME50972.2020.00113","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper introduces the preparation method and performance study of chemical vapor deposition (CVD) tungsten composite coating on TC4 titanium alloy surface. The magnetron sputtering method is used to introduce an intermediate transition layer to avoid corrosion of the titanium substrate by the formation of oxides on the surface of the titanium alloy and HF formed by CVD. After the performance test, the binding force of the composite coating and the titanium substrate was improved, and the wear resistance and corrosion resistance of the titanium alloy surface were further improved.
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