Design of a CMOS-MEMS Diffraction Grating for Near-Infrared Spectroscopy of Biomolecules

A. Losoya-Leal, S. Camacho-Léon, S. Martínez-Chapa
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引用次数: 5

Abstract

This paper discusses the design of a CMOS-MEMS diffraction grating for a micro spectrophotometer with application in non-invasive glucose monitoring based on differential near-infrared spectro photometry. There are typically two factors discussed with respect to diffraction gratings: spectral range and optical resolution. An analysis of the tradeoff between these two parameters was performed for the determination of the geometric characteristics of our grating based on the limitations of the CMOS process.
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用于生物分子近红外光谱分析的CMOS-MEMS衍射光栅设计
本文讨论了一种基于差分近红外光谱光度法的用于无创血糖监测的微型分光光度计的CMOS-MEMS衍射光栅的设计。有两个典型的因素讨论有关衍射光栅:光谱范围和光学分辨率。基于CMOS工艺的局限性,分析了这两个参数之间的权衡,以确定我们的光栅的几何特性。
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