Integration of tunable DBR-lasers with waveguides for heterodyne receiver OEIC applications using selective area MOVPE

R. Kaiser, F. Fidorra, H. Heidrich, P. Albrecht, W. Rehbein, S. Malchow, H. Schroeter-Janssen, D. Franke, G. Sztefka
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引用次数: 2

Abstract

For the first time we present the integration of a tunable buried four-section DBR-laser butt coupled to a directional coupler based on semi-insulating strip loaded (InGaAsP/InP):Fe waveguides by using selective area epitaxy with large mask areas. Good planarity after the epitaxial regrowth of the waveguide layers has been achieved applying a special preparation of the laser mesa. Average coupling efficiencies of 52% and best values of 63% have been realized. The optical power of the guided light at each output port of the coupler exceeds 1 mW.<>
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集成可调谐dbr激光器与波导外差接收OEIC应用使用选择性区域MOVPE
本文首次提出了一种基于半绝缘条带加载(InGaAsP/InP):Fe波导的可调谐埋置四段dbr激光器对接耦合到定向耦合器的集成方法,该方法采用了具有大掩模面积的选择性区域外延。采用一种特殊的激光平台制备方法,在波导层外延再生后获得了良好的平面度。平均耦合效率为52%,最佳耦合效率为63%。在耦合器的每个输出端口的导光功率超过1mw。
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