Study of the electron resonance and the development line in both electron cyclotron resonance and radio frequency ion sources

Abstract

The motion of charged particle in a crossed RF field and DC magnetic field describes the occurrence of resonance (increase of the energy gained by the particle between collisions) which causes low breakdown voltage, higher plasma intensity, and higher extracted ion current. The resonance in the microwave discharge is essential for plasma electron heating. The development line in both ECRISs and RFISs includes increase of electron population in the discharge to intensify the plasma and increase the extracted ion current plasma cooling with the use of electron injection or gas mixing increases the lifetime of the ions in the plasma allowing for multiple ionization collision and increase of the highly charged ion species. Adaptation of both electrical and geometrical properties of these sources can lead to lower beam emittance.