L. Hernandez, M. L. P. Da Silva, R. R. Lima, V. F. Cardoso
{"title":"TEOS plasma polymerized films: Impact of clustered material in humidity measurement","authors":"L. Hernandez, M. L. P. Da Silva, R. R. Lima, V. F. Cardoso","doi":"10.1109/IBERSENSOR.2014.6995509","DOIUrl":null,"url":null,"abstract":"This work aims to humidity and VOCs measurement using TEOS films or TEOS/HFE composites. Films, exposed or not to ultraviolet, were tested on cycles of relative humidity ranging from 25% to 85% and VOCs interference were also evaluated. TEOS films showed good reproducibility up to 85% relative humidity but quick reaction on 90%. The best detection limit was 100 ppm, using TEOS films exposed to UVC and TEOS/HFE composites show sensitivity of 4 Hz/% humidity, but interdigitated electrodes quickly saturate. VOCs were detected in the 1% w/w in air and do not interfere in the relative humidity detection.","PeriodicalId":296271,"journal":{"name":"2014 IEEE 9th IberoAmerican Congress on Sensors","volume":"148 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 IEEE 9th IberoAmerican Congress on Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IBERSENSOR.2014.6995509","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
This work aims to humidity and VOCs measurement using TEOS films or TEOS/HFE composites. Films, exposed or not to ultraviolet, were tested on cycles of relative humidity ranging from 25% to 85% and VOCs interference were also evaluated. TEOS films showed good reproducibility up to 85% relative humidity but quick reaction on 90%. The best detection limit was 100 ppm, using TEOS films exposed to UVC and TEOS/HFE composites show sensitivity of 4 Hz/% humidity, but interdigitated electrodes quickly saturate. VOCs were detected in the 1% w/w in air and do not interfere in the relative humidity detection.
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