{"title":"Near field investigation of woodpile structure","authors":"L. Suslik, J. Ďurišová, P. Urbancová, Š. Hardoň","doi":"10.1109/ELEKTRO49696.2020.9130292","DOIUrl":null,"url":null,"abstract":"We present in this work polymer (IP-DIP) three-dimensional (3D) woodpile structure placed on thin glass substrate. 3D woodpile structure was prepared using laser lithography by direct laser writing process. Dimensional analysis was performed by scanning electron microscopy (SEM) and atomic force microscopy (AFM). The effect of woodpile structure on near field region was investigated by near field scanning optical microscope (NSOM). The results show, that the 3D woodpile structure generates light intensity modification due to surface patterned structure.","PeriodicalId":165069,"journal":{"name":"2020 ELEKTRO","volume":"128 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 ELEKTRO","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ELEKTRO49696.2020.9130292","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We present in this work polymer (IP-DIP) three-dimensional (3D) woodpile structure placed on thin glass substrate. 3D woodpile structure was prepared using laser lithography by direct laser writing process. Dimensional analysis was performed by scanning electron microscopy (SEM) and atomic force microscopy (AFM). The effect of woodpile structure on near field region was investigated by near field scanning optical microscope (NSOM). The results show, that the 3D woodpile structure generates light intensity modification due to surface patterned structure.
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