{"title":"Torsional mirror with an electrostatically driven lever-mechanism","authors":"Hung-Yi Lin, W. Fang","doi":"10.1109/OMEMS.2000.879652","DOIUrl":null,"url":null,"abstract":"This report proposes a novel torsional mirror. The optical performance of the torsional mirror is improved through the refining of the mechanical design. SEM shows the design of the torsional mirror containing a mirror plate and its driving mechanism-the electrostatic torque generator. Hence, the scanning angle of the mirror is magnified by torque generators. In addition, the scanning frequency of the mirror can reach 17.7 kHz, and the stiffness of the mirror plate is remarkably increased by the folded frame.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879652","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 9
Abstract
This report proposes a novel torsional mirror. The optical performance of the torsional mirror is improved through the refining of the mechanical design. SEM shows the design of the torsional mirror containing a mirror plate and its driving mechanism-the electrostatic torque generator. Hence, the scanning angle of the mirror is magnified by torque generators. In addition, the scanning frequency of the mirror can reach 17.7 kHz, and the stiffness of the mirror plate is remarkably increased by the folded frame.
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