Hydrogenated silicon films for low-loss resonant reflectors operating in the visible region

Abstract

Hydrogenation is a widely used method to improve performance of electronic devices made from silicon but much less frequently to improve corresponding optical properties. Here, we study the possible use of hydrogenation to reduce inherent optical loss in silicon. We address enablement of efficient resonance metastructures such as filters, wideband reflectors, and polarizers via successful outcomes of such experimentation. A noticeable reduction in attenuation is observed.