{"title":"Spatial Light Modulators in Laser Lithography Systems","authors":"Achim Jehle","doi":"10.1364/ISA.2016.IM4F.2","DOIUrl":null,"url":null,"abstract":"Using Spatial Light Modulators in combination with high power lasers opens new possibilities in Laser Lithography. This work shows the benefit of using such devices and the challenges of integrating optical engines into these systems.","PeriodicalId":263258,"journal":{"name":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/ISA.2016.IM4F.2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Using Spatial Light Modulators in combination with high power lasers opens new possibilities in Laser Lithography. This work shows the benefit of using such devices and the challenges of integrating optical engines into these systems.
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