M. Sutagundar, B. G. Sheeparamatti, D. S. Jangamshetti
{"title":"Design Optimization of Microdisk Resonator Using Interior Point Algorithm","authors":"M. Sutagundar, B. G. Sheeparamatti, D. S. Jangamshetti","doi":"10.1109/EDKCON.2018.8770422","DOIUrl":null,"url":null,"abstract":"This paper presents design optimization of MEMS disk resonator using interior point method. Determining the optimized dimensions of disk resonator for a particular resonance frequency and quality factor along with minimum possible motional resistance is attempted. The algorithm is implemented using MATLAB. The results obtained are compared with a fabricated device. The developed method can provide faster design optimization compared to full wave simulators resulting in significant reduction of design time.","PeriodicalId":344143,"journal":{"name":"2018 IEEE Electron Devices Kolkata Conference (EDKCON)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE Electron Devices Kolkata Conference (EDKCON)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDKCON.2018.8770422","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
This paper presents design optimization of MEMS disk resonator using interior point method. Determining the optimized dimensions of disk resonator for a particular resonance frequency and quality factor along with minimum possible motional resistance is attempted. The algorithm is implemented using MATLAB. The results obtained are compared with a fabricated device. The developed method can provide faster design optimization compared to full wave simulators resulting in significant reduction of design time.
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