A. Bespalov, Mikhail S. Afanasyev, O. Golikova, I. Kharitonov, Alexandra A. Muravyeva
{"title":"Investigation of anomalous diffusion of aluminum into silicon","authors":"A. Bespalov, Mikhail S. Afanasyev, O. Golikova, I. Kharitonov, Alexandra A. Muravyeva","doi":"10.26583/bit.2023.2.11","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":278246,"journal":{"name":"Bezopasnost informacionnyh tehnology","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Bezopasnost informacionnyh tehnology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.26583/bit.2023.2.11","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}