Y. Aoki, K. Morita, K. Deguchi, T. Miyakoshi, Y. Miyaoka, T. Hiroki, O. Koyama
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引用次数: 3
Abstract
We developed a negative-type photoresist of WOx film and obtained a low noise groove. We also confirmed a feasibility of the transmissive stamper using the WOx film for multi-layer discs.
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