Macro-Conformality of Coatings Deposited using High Speed Spatial PEALD

E. Dickey, B. Danforth, W. Barrow
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Abstract

Rotational Spatial PEALD has been used to deposit thin films on half-sphere lenses. Non-uniformity of less than ± 1% has been demonstrated for Nb2O5 deposited at 1.4 A/second, and for SiO2 deposited at 6 A/second.
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高速空间PEALD沉积涂层的宏观一致性
旋转空间激光衍射已被用于在半球面透镜上沉积薄膜。在1.4 A/s下沉积的Nb2O5和6 A/s下沉积的SiO2的不均匀性小于±1%。
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