Optimization of auxetic structures for MEMS applications

Abstract

Complex inertial Micro Electro Mechanical Systems (MEMS) usually require the simultaneous motion of the masses in more than one direction and an overall linear behavior. Furthermore, since it is usually very difficult to actuate the device in all the required directions, complex spring configurations for the conversion of the motion are needed. Here we present possible solutions to this problem through auxetic structures. The goal of the work is to propose a new topology optimization procedure which can be used as a tool during the design phase of the optimal auxetic structure, that is completely compatible with the MEMS fabrication processes available so far and that allows the motion conversion in a MEMS device without entering the nonlinear regime.