A MEMS slip sensor: Estimations of triaxial force and coefficient of static friction for prediction of a slip

Taiyu Okatani, A. Nakai, T. Takahata, I. Shimoyama
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引用次数: 7

Abstract

We report on a MEMS slip sensor that estimates triaxial force as well as coefficient of static friction for prediction of a slip. The sensor was composed of the outer and inner elastomers separated by a hard substrate, which enable to measure triaxial force independently of coefficient of static friction. We fabricated a prototype of the sensor and evaluated it by pressing and sliding it on various conditions of coefficient of static friction.
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MEMS滑移传感器:用于滑移预测的三轴力和静摩擦系数的估计
我们报告了一种MEMS滑移传感器,它可以估计三轴力和静摩擦系数来预测滑移。该传感器由坚硬衬底分隔的内外弹性体组成,能够独立于静摩擦系数测量三轴力。我们制作了传感器的原型,并在各种静摩擦系数条件下对其进行了按压和滑动评估。
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