Nanxi Li, C. Ho, Yanmei Cao, Shiyang Zhu, G. Chen, Yuan Hsing Fu, Yao Zhu, D. Tan, L. Lee
{"title":"Aluminum Nitride Photonics Platforms on Silicon Substrate","authors":"Nanxi Li, C. Ho, Yanmei Cao, Shiyang Zhu, G. Chen, Yuan Hsing Fu, Yao Zhu, D. Tan, L. Lee","doi":"10.1364/cleo_si.2021.sth2h.3","DOIUrl":null,"url":null,"abstract":"The CMOS-compatible AlN photonics platforms developed within Institute of Microelectronics (IME) are presented, and nonlinear index of the AlN is reported. The photonics devices demonstrated are reviewed, and the future prospective is provided.","PeriodicalId":384075,"journal":{"name":"2021 Conference on Lasers and Electro-Optics (CLEO)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 Conference on Lasers and Electro-Optics (CLEO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/cleo_si.2021.sth2h.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The CMOS-compatible AlN photonics platforms developed within Institute of Microelectronics (IME) are presented, and nonlinear index of the AlN is reported. The photonics devices demonstrated are reviewed, and the future prospective is provided.
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