I. Mihăilescu, E. Gyorgy, V. Teodorescu, G. Marin, D. Pantelica, A. Andrei, J. Neamțu
{"title":"New studies of reactive pulsed laser deposition","authors":"I. Mihăilescu, E. Gyorgy, V. Teodorescu, G. Marin, D. Pantelica, A. Andrei, J. Neamțu","doi":"10.1117/12.312749","DOIUrl":null,"url":null,"abstract":"We report the synthesis and deposition of TiC films by reactive pulsed laser deposition. Ti targets have been submitted to multipulse UV laser action in low pressure CH4. The thin films were grown on a collector placed parallel to the target. The films were characterized by electron microscopy, electron spectroscopy and nuclear techniques.","PeriodicalId":383583,"journal":{"name":"ROMOPTO International Conference on Micro- to Nano- Photonics III","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-07-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ROMOPTO International Conference on Micro- to Nano- Photonics III","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.312749","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We report the synthesis and deposition of TiC films by reactive pulsed laser deposition. Ti targets have been submitted to multipulse UV laser action in low pressure CH4. The thin films were grown on a collector placed parallel to the target. The films were characterized by electron microscopy, electron spectroscopy and nuclear techniques.
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