Characterization of deeply etched uniform sidewall gratings in InP/InGaAsP ridge waveguides

R. Dylewicz, R. Green, M. Sorel, A. C. Bryce, Richard M. De La Rue
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引用次数: 1

Abstract

We report on the spectral characterization of 1st order sidewall gratings with constant period of Λ = 236 nm, which were deeply etched into InP-based passive ridge waveguides. Periodic structures of this type with variable geometry (adjustable recess depth) may be used as the mirrors with well-controlled reflectivity for laser facets and intracavity reflectors, as well as in optical pulse compressors, when grating period chirp is imposed [1].
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InP/InGaAsP脊波导中深蚀刻均匀侧壁光栅的表征
本文报道了一阶恒周期Λ = 236 nm的边壁光栅的光谱特性,该光栅被刻蚀到inp基无源脊波导中。当施加光栅周期啁啾时,这种具有可变几何形状(凹槽深度可调)的周期结构可以用作激光切面和腔内反射器以及光脉冲压缩器的反射率控制良好的反射镜[1]。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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