Measurement accuracy of the white light interferometer with reference light beam

Abstract

Process of increasing structure integration density in microelectronics contributes to even more restricted tolerances of electronic packaging. For this reason advanced packages must be measured with very high accuracy. In previous research a white light interferometer with reference light beam was built. This paper is sacrificed to the influences on measurement accuracy done with white light interferometer with a reference light beam. In the first part of the paper all possible influences on measurement accuracy will be named. Then the most significant measuring errors for Michelson interferometer with reference light beam will be widely introduced and estimated