M. Epitaux, J. Verdeil, Y. Petremand, W. Noell, N. D. de Rooij
{"title":"Micro-machined XY stage for fiber optics module alignment","authors":"M. Epitaux, J. Verdeil, Y. Petremand, W. Noell, N. D. de Rooij","doi":"10.1109/OFC.2005.192911","DOIUrl":null,"url":null,"abstract":"A novel silicon micro-machined XY stage with a hybrid micro-lens for fiber optics module alignment is presented. A MEMS micro-alignment method and silicon chip design are described. Finally the micro-fabricated device performance is discussed.","PeriodicalId":265561,"journal":{"name":"OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2005-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OFC.2005.192911","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 13
Abstract
A novel silicon micro-machined XY stage with a hybrid micro-lens for fiber optics module alignment is presented. A MEMS micro-alignment method and silicon chip design are described. Finally the micro-fabricated device performance is discussed.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
