{"title":"Fluid PIC Simulation Of Plasma Processing Devices","authors":"G. Lapenta, J. Brackbill","doi":"10.1109/PLASMA.1994.588745","DOIUrl":null,"url":null,"abstract":"complexity of the structure. So far, several numerical models have been reported concerning the EM models of ICPS[’]. The numerical solutions could not describe the physical insight of EM fields and a considerable amount of consumed CPU time could have been expected. We used the Mode Analysis Technique (MAT) to obtain a closedform solution, which provided the behaviors of each mode excited in the ICPS and the relationship between eigenmodes and the reactor geometry.","PeriodicalId":254741,"journal":{"name":"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLASMA.1994.588745","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
complexity of the structure. So far, several numerical models have been reported concerning the EM models of ICPS[’]. The numerical solutions could not describe the physical insight of EM fields and a considerable amount of consumed CPU time could have been expected. We used the Mode Analysis Technique (MAT) to obtain a closedform solution, which provided the behaviors of each mode excited in the ICPS and the relationship between eigenmodes and the reactor geometry.
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