{"title":"A novel optimization procedure for designing of high-sensitivity piezoresistive accelerometers utilizing MNA method","authors":"T. D. Tran, T. Bui, T. G. Nguyen","doi":"10.1109/MHS.2009.5352097","DOIUrl":null,"url":null,"abstract":"This paper presents the novel optimization procedure for designing of high-sensitivity piezoresistive accelerometers using a MNA tool called SUGAR. The purpose of this novel method is to achieve the high sensitivity device. The dimension of sensor is as small as 1.5 mm2, so it is suitable for many specific applications.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International Symposium on Micro-NanoMechatronics and Human Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MHS.2009.5352097","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents the novel optimization procedure for designing of high-sensitivity piezoresistive accelerometers using a MNA tool called SUGAR. The purpose of this novel method is to achieve the high sensitivity device. The dimension of sensor is as small as 1.5 mm2, so it is suitable for many specific applications.
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