{"title":"IntelliSuite® EMagAnalysis: an S-parameter Extraction Tool for Real Deformed Structures","authors":"Fangyuan Xu, Shan-Liang Zhang, Lei Zhou, Bo Xu","doi":"10.1109/NEMS.2007.352031","DOIUrl":null,"url":null,"abstract":"This paper discusses the method to extract s-parameters of real deformed MEMS devices with the combination of IntelliSuitereg EMagAnalysis and IntelliSuitereg TEMAnalysis, and the use of the data structure compatibility of these two analysis modules. Through this novel method that has been developed, more accurate results are gotten when analyzing a classical structure of RF switch.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2007.352031","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper discusses the method to extract s-parameters of real deformed MEMS devices with the combination of IntelliSuitereg EMagAnalysis and IntelliSuitereg TEMAnalysis, and the use of the data structure compatibility of these two analysis modules. Through this novel method that has been developed, more accurate results are gotten when analyzing a classical structure of RF switch.
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