A study on characteristics of electromagnetic and piezoelectric micro actuators

H. Lu, Jianguo Zhu
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Abstract

Electromagnetic actuators are dominant in the macro field. Although there are several hindrances, electromagnetic actuators still have some advantages in the application of micro systems. Piezoelectric actuator is also an attractive drive principle for micro systems due to its large force and simple structure, but some drawbacks inevitably exist. This paper presents a comparative study of both drive principles and a better understanding of the basic performances and limitations of the both principles for the system design.
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电磁和压电微执行器的特性研究
电磁执行器在宏观领域占主导地位。尽管存在一些阻碍,但电磁执行器在微系统应用中仍具有一定的优势。压电作动器的受力大,结构简单,是微系统的一种有吸引力的驱动原理,但不可避免地存在一些缺点。本文对两种驱动原理进行了比较研究,更好地了解了两种驱动原理的基本性能和局限性。
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