T. Omori, T. Suzuki, Kunihiko Hashimoto, M. Yamaguchi
{"title":"Selective area preparation of PZT discs and their ultrasonic applications","authors":"T. Omori, T. Suzuki, Kunihiko Hashimoto, M. Yamaguchi","doi":"10.1109/ULTSYM.2000.921491","DOIUrl":null,"url":null,"abstract":"This paper describes a modified sol-gel method to prepare PZT discs of nearly 1 /spl mu/m thickness without repeating any spin-coating and prebaking processes. In the method, PZT precursor-gel discs having a small area are formed out of precursor-sol prior to sintering. This is carried out by pouring the precursor-sol into a ZnO mold. Ultrasonic transducers were fabricated using the PZT discs and their piezoelectricity in GHz ranges were discussed.","PeriodicalId":350384,"journal":{"name":"2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2000.921491","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper describes a modified sol-gel method to prepare PZT discs of nearly 1 /spl mu/m thickness without repeating any spin-coating and prebaking processes. In the method, PZT precursor-gel discs having a small area are formed out of precursor-sol prior to sintering. This is carried out by pouring the precursor-sol into a ZnO mold. Ultrasonic transducers were fabricated using the PZT discs and their piezoelectricity in GHz ranges were discussed.
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