Self-organized laser-produced Si and Ni micro-tip field endfter arrays enchanced with carbon nanotubes

A. Karabutov, A. V. Simakin, E. N. Loubnin, G. A. Shafeev
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Abstract

Self-organized Si and metal micro-tip effective field electron emission arrays were produced using laser beam evaporation. Simple and relatively cheap production method of the quazi-periodical micro-tip arrays, which does not require any lithographic and microelectronic procedures, allows to form field electron emitters with very low emission threshold field of 1-5 V/w. Further improvement of the emission uniformity and the threshold field for the arrays can be achieved by modification of our production technique and introducing of carbon nanotube incorporation during the laser beam evaporation process. Quazi-periodical arrays of Si and Ni micro-tips with carbon nanotubes incorporated into the surface layer were produced by laser-assisted evaporation of Si or Ni wafers in vacuum.
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碳纳米管增强自组织激光制备的硅和镍微尖端场端阵列
利用激光束蒸发制备了自组织硅和金属微针尖有效场电子发射阵列。准周期微针尖阵列的生产方法简单且相对便宜,不需要任何光刻和微电子程序,可以形成1-5 V/w的极低发射阈值场的场电子发射器。通过改进生产工艺,在激光束蒸发过程中引入碳纳米管,可以进一步改善阵列的发射均匀性和阈值场。采用真空激光蒸发的方法制备了硅或镍微针尖的准周期阵列,并将碳纳米管嵌入其表层。
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