{"title":"Low cost prototyping of microfluidic structure","authors":"J. Alvankarian, B. Majlis","doi":"10.1109/SMELEC.2010.5549373","DOIUrl":null,"url":null,"abstract":"An elastomeric microfluidic structure was developed by polymerization of a liquid photopolymer using UV lithography process. Integration of different components of a microfluidic device including microchannel, micromixer, and microchamber, on one layer and by using one photomask is practiced. More complicated geometries and 2-layer chip was examined in this research and gives promising results. This process enables well control over the thicknesses of the layers, and dimensions of the components considering. The proposed simple process benefits from low cost in development time and expenses of the materials.","PeriodicalId":308501,"journal":{"name":"2010 IEEE International Conference on Semiconductor Electronics (ICSE2010)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 IEEE International Conference on Semiconductor Electronics (ICSE2010)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMELEC.2010.5549373","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
An elastomeric microfluidic structure was developed by polymerization of a liquid photopolymer using UV lithography process. Integration of different components of a microfluidic device including microchannel, micromixer, and microchamber, on one layer and by using one photomask is practiced. More complicated geometries and 2-layer chip was examined in this research and gives promising results. This process enables well control over the thicknesses of the layers, and dimensions of the components considering. The proposed simple process benefits from low cost in development time and expenses of the materials.