{"title":"Polymer deformable membrane mirrors for focus control using SU-8 2002","authors":"E. Dunbar, M. Leone, S. Lukes, D. Dickensheets","doi":"10.1109/OMEMS.2008.4607867","DOIUrl":null,"url":null,"abstract":"Large stroke deformable membrane mirrors are designed for primary focus control and compensation of focus-induced spherical aberration. SU-8 2002 epoxy membranes 2 mum thick and up to 1 cm diameter, with symmetric aluminum coatings, are described.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607867","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
Large stroke deformable membrane mirrors are designed for primary focus control and compensation of focus-induced spherical aberration. SU-8 2002 epoxy membranes 2 mum thick and up to 1 cm diameter, with symmetric aluminum coatings, are described.
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