S. Yahagi, H. Ishihara, M. Ishii, S. Kumagai, M. Sasaki
{"title":"Grating design for packaged wavelength selective infrared emitter using surface plasmon polariton","authors":"S. Yahagi, H. Ishihara, M. Ishii, S. Kumagai, M. Sasaki","doi":"10.23919/LTB-3D.2017.7947479","DOIUrl":null,"url":null,"abstract":"Plasmonic thermal emitter is promising for improving the efficiency of the gas sensor generating the infrared matched with the gas absorption band. The combination with the microheater in the vacuum packaged setup will further reduce the thermal loss. Here, considering CO2 gas sensing, the grating design robust against the dimension error is examined.","PeriodicalId":183993,"journal":{"name":"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/LTB-3D.2017.7947479","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Plasmonic thermal emitter is promising for improving the efficiency of the gas sensor generating the infrared matched with the gas absorption band. The combination with the microheater in the vacuum packaged setup will further reduce the thermal loss. Here, considering CO2 gas sensing, the grating design robust against the dimension error is examined.
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