Nicholas A. Boynton, A. Pomerene, A. Starbuck, A. Lentine, C. DeRose
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引用次数: 4
Abstract
We present a quantitative analysis of the correlation of resonant wavelength variation with process variables, and find that 50% of the resonant wavelength variation for microrings is due to systematic process conditions. We also discuss the improvement of device uniformity by mitigating these systematic variations.
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