Large linear micromirror array for UV femtosecond laser pulse shaping

S. Waldis, S. Weber, W. Noell, J. Extermann, D. Kiselev, L. Bonacina, J. Wolf, N. D. de Rooij
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引用次数: 5

Abstract

We are fabricating a bulk-micromachined micromirror device for laser pulse shaping applications on femtosecond time scales. An array of micromirrors is used to individually retard or diminish certain laser frequencies spanning from the UV to the near-infrared. The individual mirrors are fixed by two springs on either side and can be tilted (amplitude modulation) or moved out-of plane (phase modulation) using asymmetrical or symmetrical vertical comb drives, respectively.
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用于紫外飞秒激光脉冲整形的大型线性微镜阵列
我们正在制造一种用于飞秒时间尺度激光脉冲整形应用的大块微机械微镜装置。微镜阵列被用来单独延缓或减少从紫外线到近红外的某些激光频率。每个镜子由两侧的两个弹簧固定,可以分别使用不对称或对称的垂直梳状驱动器倾斜(调幅)或移出平面(相位调制)。
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