Nanostructured effective-index micro-optical devices based on blazed 2-D sub-wavelength gratings with uniform features on a variable-pitch

D. Dickensheets, H. Herzig, W. Nakagawa, K. Suter, U. Staufer
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引用次数: 3

Abstract

Sub-wavelength two-dimensional gratings are formed by etching holes into silicon using DRIE followed by thermal oxidation. Smoothly graded effective index blazing is possible using uniform holes on a variable grating pitch, exhibiting minimal etch lag.
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基于可变节距均匀发光二维亚波长光栅的纳米结构有效折射率微光器件
亚波长二维光栅是通过在硅上刻蚀孔,然后热氧化而形成的。在可变光栅间距上使用均匀的孔,可以实现平滑渐变的有效折射率燃烧,表现出最小的蚀刻滞后。
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