P. Blondy, A. Pothier, R. Stefanini, J. Gauvin, Damien Passerieux, Olivier Vendier, F. Courtade
{"title":"Development of an all-metal large contact force reliable RF-MEMS relay for space applications","authors":"P. Blondy, A. Pothier, R. Stefanini, J. Gauvin, Damien Passerieux, Olivier Vendier, F. Courtade","doi":"10.23919/EUMC.2012.6459332","DOIUrl":null,"url":null,"abstract":"This paper presents the development of and RF-MEMS relay for space applications. The integration of a large force electrostatic actuator has permitted dramatic improvement of the switch fabrication yield and reliability. The device does not suffer from well-known RF-MEMS issues such as drift in control voltage, temperature sensitivity. The device could be held in the down state for several days, at 70°C, without significant changes in the static characteristics and several devices have been successfully cycled up to 50 million cycles, with stable contact resistance.","PeriodicalId":266910,"journal":{"name":"2012 42nd European Microwave Conference","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2012-10-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 42nd European Microwave Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/EUMC.2012.6459332","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper presents the development of and RF-MEMS relay for space applications. The integration of a large force electrostatic actuator has permitted dramatic improvement of the switch fabrication yield and reliability. The device does not suffer from well-known RF-MEMS issues such as drift in control voltage, temperature sensitivity. The device could be held in the down state for several days, at 70°C, without significant changes in the static characteristics and several devices have been successfully cycled up to 50 million cycles, with stable contact resistance.
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