Study on the nature frequency of optical excitation quartz tuning fork sensor

Zhouqiang Zhang, Binshan Ma, Shuhai Jia
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Abstract

The finite element method is used to analyze the nature frequency changing with the structure sizes of MEMS quartz tuning fork. Through the analysis, it can be found that the length and the width of tuning fork arms influence the nature frequency in a large extent. However, the nature frequency has a little influence by changing the gap between the tuning fork arms. So, when using the second order nature frequency, these influencing factors should be taken into consideration. By analyzing the relationship between the nature frequency and structure sizes, the range of tuning fork structure sizes can be acquired, it can ensure the second order nature frequency without disturb by first or third order nature frequency.
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光学激励石英音叉传感器固有频率的研究
采用有限元法分析了MEMS石英音叉的固有频率随结构尺寸的变化规律。通过分析,可以发现音叉臂的长度和宽度在很大程度上影响固有频率。然而,通过改变音叉臂之间的间隙,自然频率有一点影响。因此,在使用二阶固有频率时,应考虑这些影响因素。通过分析固有频率与结构尺寸的关系,得到音叉结构尺寸的范围,保证二阶固有频率不受一阶或三阶固有频率的干扰。
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