{"title":"Conductive AFM for Nanoscale Analysis of High-k Dielectric Metal Oxides","authors":"C. Rodenbücher, M. Wojtyniak, K. Szot","doi":"10.1007/978-3-030-15612-1_2","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":377915,"journal":{"name":"Electrical Atomic Force Microscopy for Nanoelectronics","volume":"92 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Electrical Atomic Force Microscopy for Nanoelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/978-3-030-15612-1_2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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