{"title":"Towards integration of glass microlens with silicon comb-drive X-Y microstage","authors":"K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel","doi":"10.1109/OMEMS.2008.4607882","DOIUrl":null,"url":null,"abstract":"We present the design and the fabrication of a silicon X-Y microstage and a new concept of its integration with a glass microlens to obtain an optical 2D scanner for the miniaturized microscope on-chip.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607882","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 9
Abstract
We present the design and the fabrication of a silicon X-Y microstage and a new concept of its integration with a glass microlens to obtain an optical 2D scanner for the miniaturized microscope on-chip.
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