{"title":"Some Comparisons of Non Contact Surface Profiling Instruments","authors":"N. J. Brown, W. Eickelberg","doi":"10.1364/oft.1988.tha1","DOIUrl":null,"url":null,"abstract":"The LLNL, Zygo (mod 5500), WYKO (Topo - 2 D, Topo - 3 D), and Photographic Sciences (MP-2000), non contact optical profilers were compared and found consistent within their common band limits.","PeriodicalId":354934,"journal":{"name":"Optical Fabrication and Testing","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1988-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Fabrication and Testing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oft.1988.tha1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The LLNL, Zygo (mod 5500), WYKO (Topo - 2 D, Topo - 3 D), and Photographic Sciences (MP-2000), non contact optical profilers were compared and found consistent within their common band limits.
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