Investigations on Infrared(IR) Sensitive Material for Microbolometer Using Material Selection Approaches

Devanshi Gupta, N. Gupta
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Abstract

In this paper, distinct desirable and potential materials for the IR sensitive material of a microbolometer along with the material performance properties such as Temperature co-efficient of resistance (TCR), Responsivity, Detectivity, Time constant, Thermal conductance and mass are taken into consideration and Ashby's, VlseKriterijumska Optimizacija I Kompromisno Resenje in Serbian (VIKOR) and Technique for order preference by similarity to ideal solution (TOPSIS)approaches are applied to attain the most suitable IR sensitive material. The analysis results propose that atomic layer deposited (ALD) ZnO is the most advisable IR sensitive material for the better performance of the microbolometer.
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用材料选择方法研究微热计红外敏感材料
本文考虑了微测热计红外敏感材料的不同理想材料和潜在材料,以及材料的性能,如电阻温度系数(TCR)、响应性、探测性、时间常数、热导率和质量。采用塞尔维亚语VlseKriterijumska Optimizacija I Kompromisno Resenje (VIKOR)和TOPSIS方法获得最合适的红外敏感材料。分析结果表明,原子层沉积(ALD) ZnO是最理想的红外敏感材料,具有更好的微热计性能。
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