{"title":"Mechanical characteristic of capacitive pressure sensors supported by curb beam","authors":"Wei Zhou, M. Qin","doi":"10.1109/ICIA.2004.1373366","DOIUrl":null,"url":null,"abstract":"Starting with variable gap capacitive sensor, and based on the reliability analysis of manufacture, a rectangular membrane sensor array is presented with a P+ beam on its backside as the supported and etch stop layer. With this bearing structure, the reliability and applicability of the pressure sensitive cell is therefore improved. The finite element method (FEM) is adopted to calculate the mechanical characteristic of the configuration that mentioned above and to analysis influence of the beam's dimension on the performance of the sensor. The practical fabrication process is conceived in the end.","PeriodicalId":297178,"journal":{"name":"International Conference on Information Acquisition, 2004. Proceedings.","volume":"63 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Information Acquisition, 2004. Proceedings.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIA.2004.1373366","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Starting with variable gap capacitive sensor, and based on the reliability analysis of manufacture, a rectangular membrane sensor array is presented with a P+ beam on its backside as the supported and etch stop layer. With this bearing structure, the reliability and applicability of the pressure sensitive cell is therefore improved. The finite element method (FEM) is adopted to calculate the mechanical characteristic of the configuration that mentioned above and to analysis influence of the beam's dimension on the performance of the sensor. The practical fabrication process is conceived in the end.
IF 64.8 1区 综合性期刊NaturePub Date : 2020-04-01DOI: 10.1038/s41586-020-2153-8
Frido Welker, Jazmín Ramos-Madrigal, Petra Gutenbrunner, Meaghan Mackie, Shivani Tiwary, Rosa Rakownikow Jersie-Christensen, Cristina Chiva, Marc R. Dickinson, Martin Kuhlwilm, Marc de Manuel, Pere Gelabert, María Martinón-Torres, Ann Margvelashvili, Juan Luis Arsuaga, Eudald Carbonell, Tomas Marques-Bonet, Kirsty Penkman, Eduard Sabidó, Jürgen Cox, Jesper V. Olsen, David Lordkipanidze, Fernando Racimo, Carles Lalueza-Fox, José María Bermúdez de Castro, Eske Willerslev, Enrico Cappellini