Mechanical characteristic of capacitive pressure sensors supported by curb beam

Abstract

Starting with variable gap capacitive sensor, and based on the reliability analysis of manufacture, a rectangular membrane sensor array is presented with a P+ beam on its backside as the supported and etch stop layer. With this bearing structure, the reliability and applicability of the pressure sensitive cell is therefore improved. The finite element method (FEM) is adopted to calculate the mechanical characteristic of the configuration that mentioned above and to analysis influence of the beam's dimension on the performance of the sensor. The practical fabrication process is conceived in the end.