{"title":"A micro helium-discharge photoionization detector for gas sensing","authors":"S. Narayanan, M. Agah, G. Rice","doi":"10.1109/ICSENS.2013.6688154","DOIUrl":null,"url":null,"abstract":"This paper reports a 2cm × 1cm easy-to-micromachine helium discharge photoionization detector (μHeDPID) for use in micro gas chromatography by utilizing a lift-off process. This universal detector consumes a miserly 2.5mW for plasma generation and non-destructively photoionizes analyte compounds, thus avoiding fouling of electrodes. The ionized species is detected by a remote electrode connected to a picoammeter. The detector exhibits at least 350pg and 50ppm detection limit for n-octane in air. Despite the detector simplicity, its efficiency is in par with previously reported destructive plasma detectors which are based on more sophisticated spectrometric analysis.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"56 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE SENSORS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2013.6688154","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper reports a 2cm × 1cm easy-to-micromachine helium discharge photoionization detector (μHeDPID) for use in micro gas chromatography by utilizing a lift-off process. This universal detector consumes a miserly 2.5mW for plasma generation and non-destructively photoionizes analyte compounds, thus avoiding fouling of electrodes. The ionized species is detected by a remote electrode connected to a picoammeter. The detector exhibits at least 350pg and 50ppm detection limit for n-octane in air. Despite the detector simplicity, its efficiency is in par with previously reported destructive plasma detectors which are based on more sophisticated spectrometric analysis.
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